ACLS - Axcelis Announces Multiple Shipments of 150mm 'Purion M SiC Power Series' Implanters to Leading Power Device Manufacturers in China | Benzinga
BEVERLY, Mass., March 20, 2024 /PRNewswire/ -- Axcelis Technologies, Inc. (NASDAQ:ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today multiple shipments of the Company's Purion M™ SiC medium current implanter to several leading power device chipmakers located in China. The systems, which shipped in the first quarter, will be used for 150mm production of silicon carbide power devices supporting automotive, industrial, energy, and other power intensive applications.